The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2014
Filed:
Sep. 28, 2010
Fumio Watanabe, Ibaraki, JP;
Fumio Watanabe, Ibaraki, JP;
Vaclab Inc., Ibaraki, JP;
Abstract
A vacuum measurement device includes a grid () and an electron source () provided inside a vacuum vessel, and an ion beam () extracted outside the grid is captured by an ion collector () and is converted into a current signal. The grid () is a grid-shaped cylinder, and an ion outlet () is opened and elongated in the longitudinal direction along the side surface of the grid (). The vacuum measurement device includes a primary ion collector () capturing specific ions and a secondary ion collector () capturing other ions. The gas molecule density of the ion source is obtained from a total current of the primary and secondary ion collectors, and a ratio of the gas molecule density of the specific ions relative to the gas molecule density is obtained from a ratio of the current of the primary ion collector () relative to the total current.