The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2014
Filed:
Sep. 27, 2007
Process for forming a film, piezoelectric film, piezoelectric device, and liquid discharge apparatus
Takamichi Fujii, Kanagawa-ken, JP;
Yukio Sakashita, Kanagawa-ken, JP;
Takamichi Fujii, Kanagawa-ken, JP;
Yukio Sakashita, Kanagawa-ken, JP;
FUJIFILM Corporation, Tokyo, JP;
Abstract
Film formation conditions are determined in accordance with relationships among a film formation temperature Ts (° C.), a difference Vs−Vf (V), which is the difference between a plasma potential Vs (V) in the plasma at the time of the film formation and a floating potential Vf (V), and characteristics of the formed film. For a piezoelectric film containing at least one kind of Pb-containing perovskite type oxide, the film formation conditions should preferably be determined within a range such that Formulas (1) and (2) shown below are satisfied:(° C.)≧400  (1)−0.2+100<()<−0.2+130  (2)