The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2014
Filed:
Nov. 19, 2012
Applicants:
Benjamin Y. H. Liu, North Oaks, MN (US);
Thuc M. Dinh, Shakopee, MN (US);
Yamin MA, Roseville, MN (US);
Inventors:
Benjamin Y. H. Liu, North Oaks, MN (US);
Thuc M. Dinh, Shakopee, MN (US);
Yamin Ma, Roseville, MN (US);
Assignee:
MSP Corporation, Shoreview, MN (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); F25B 21/02 (2006.01); F25J 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods and apparatus for recovery of precursor vapor from a gas and precursor vapor mixture used in a deposition process. The gas and precursor vapor mixture is passed through a multitude of heat transfer surfaces in a heat conducting housing causing the precursor vapor to condense. The precursor vapor in liquid form is then collected after condensation.