The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2014
Filed:
Dec. 14, 2011
Gregory N. Nielson, Albuquerque, NM (US);
Gregory R. Bogart, Corrales, NM (US);
Eric Langlois, Albuquerque, NM (US);
Murat Okandan, Edgewood, NM (US);
Gregory N. Nielson, Albuquerque, NM (US);
Gregory R. Bogart, Corrales, NM (US);
Eric Langlois, Albuquerque, NM (US);
Murat Okandan, Edgewood, NM (US);
Sandia Corporation, Albuquerque, NM (US);
Abstract
A bulk micromachined vibratory gyro in which a proof mass has a bulk substrate thickness for a large mass and high inertial sensitivity. In embodiments, optical displacement transduction is with multi-layer sub-wavelength gratings for high sensitivity and low cross-talk with non-optical drive elements. In embodiments, the vibratory gyro includes a plurality of multi-layer sub-wavelength gratings and a plurality of drive electrodes to measure motion of the proof mass induced by drive forces and/or moments and induced by the Coriolis Effect when the gyro experiences a rotation. In embodiments, phase is varied across the plurality gratings and a multi-layer grating having the best performance is selected from the plurality.