The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2014
Filed:
Jul. 15, 2009
Motoaki Hara, Kawasaki, JP;
Tokihiro Nishihara, Kawasaki, JP;
Shinji Taniguchi, Kawasaki, JP;
Takeshi Sakashita, Kawasaki, JP;
Tsuyoshi Yokoyama, Kawasaki, JP;
Masafumi Iwaki, Kawasaki, JP;
Masanori Ueda, Kawasaki, JP;
Motoaki Hara, Kawasaki, JP;
Tokihiro Nishihara, Kawasaki, JP;
Shinji Taniguchi, Kawasaki, JP;
Takeshi Sakashita, Kawasaki, JP;
Tsuyoshi Yokoyama, Kawasaki, JP;
Masafumi Iwaki, Kawasaki, JP;
Masanori Ueda, Kawasaki, JP;
Taiyo Yuden Co., Ltd., Tokyo, JP;
Abstract
An acoustic wave device includes a substrate and a plurality of piezoelectric thin film resonators formed over the substrate. Each of the plurality of the piezoelectric thin film resonators includes lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film and opposed to the lower electrode through the piezoelectric film. Each of the piezoelectric thin film resonators is partly supported by the substrate and extends above the substrate to form a cavity between the substrate and each lower electrodes. The cavity continuously extending under the plurality of the piezoelectric thin film resonators.