The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2014
Filed:
Oct. 14, 2011
Richard T. Chen, Burbank, CA (US);
Ezekiel J. J. Kruglick, San Diego, CA (US);
Christopher A. Bang, San Diego, CA (US);
Dennis R. Smalley, Newhall, CA (US);
Pavel B. Lembrikov, Santa Monica, CA (US);
Richard T. Chen, Burbank, CA (US);
Ezekiel J. J. Kruglick, San Diego, CA (US);
Christopher A. Bang, San Diego, CA (US);
Dennis R. Smalley, Newhall, CA (US);
Pavel B. Lembrikov, Santa Monica, CA (US);
Microfabrica Inc., Van Nuys, CA (US);
Abstract
Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. Some embodiments are directed to various designs of cantilever-like probe structures while other embodiments are directed to methods for fabricating probe structures. In some embodiments, methods are used to form probe structures from a plurality of planar multi-material layers wherein each probe structure includes a contact tip, a compliant body, and a bonding material that can be used in bonding the probe to a substrate and wherein the compliant body provides for elastic compression of the probe in a plane of primary motion during use and wherein during formation of the layers a stacking direction of the plurality of layers is perpendicular to the plane of primary motion.