The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2014
Filed:
Feb. 29, 2012
Alfons Dehe, Reutlingen, DE;
Martin Wurzer, Munich, DE;
Christian Herzum, Stamberg, DE;
Wolfgang Klein, Zorneding, DE;
Stefan Barzen, Munich, DE;
Alfons Dehe, Reutlingen, DE;
Martin Wurzer, Munich, DE;
Christian Herzum, Stamberg, DE;
Wolfgang Klein, Zorneding, DE;
Stefan Barzen, Munich, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
A tunable MEMS device and a method of manufacturing a tunable MEMS device are disclosed. In accordance with an embodiment of the present invention, a semiconductor device comprises a substrate, a moveable electrode and a counter electrode. The moveable electrode or the counter electrode comprises a first region and a second region, wherein the first region is isolated from the second region, wherein the first region is configured to be tuned, wherein the second region is configured to provide a sensing signal or control a system, and wherein the moveable electrode and the counter electrode are mechanically connected to the substrate.