The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 13, 2014

Filed:

Sep. 26, 2012
Applicant:

Panasonic Corporation, Kadoma, JP;

Inventors:

Akihiro Odagawa, Osaka, JP;

Nozomu Matsukawa, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/326 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
Abstract

The production method for the oxidized carbon thin film of the present disclosure includes: a first step of preparing a carbon thin film and iron oxide that is in contact with the carbon thin film and contains FeO; and a second step of forming an oxidized carbon thin film having an oxidized portion composed of oxidized carbon by applying a voltage or current between the carbon thin film and the iron oxide with the carbon thin film side being positive and thereby oxidizing a contact portion of the carbon thin film with the iron oxide to change it into the oxidized portion. This production method allows a pattern of nanometer order to be formed on a carbon thin film represented by graphene. The method causes less damage to the formed pattern and has high affinity with a semiconductor process, thereby enabling a wide range of applications as a process technique for producing an electronic device.


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