The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2014
Filed:
Sep. 14, 2010
Christof Metzmacher, Rearen, BE;
Michael Schaaf, Herzogenrath, DE;
Peter Klaus Bachmann, Wuerselen, DE;
Christof Metzmacher, Rearen, BE;
Michael Schaaf, Herzogenrath, DE;
Peter Klaus Bachmann, Wuerselen, DE;
Koninklijke Philips N.V., Eindhoven, NL;
Abstract
The present invention relates to a foil trap device for debris mitigation, in particular in an EUV system. The foil trap comprises a plurality of spaced apart foils () extending from an entrance side towards an exit side of the foil trap, said foils () being arranged to allow a straight pass of radiation between the entrance side and the exit side. The foils () are coated at least at entrance side edges with a layer () of a carbon material containing a fraction of at least 60% of sp3-hybridized carbon atoms, or with a layer () of carbon nanotubes. As an alternative, the foils () are made of a bulk carbon material of the above composition. The proposed foil trap offers the combination of a high thermal conductivity, a high thermo-chemical resistance against Sn and other liquid metals and a high mechanical stiffness.