The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2014
Filed:
Aug. 16, 2011
Applicant:
Lutz Rebstock, Gaienhofen, DE;
Inventor:
Lutz Rebstock, Gaienhofen, DE;
Assignee:
Dynamic Micro System Semiconductor Equipment GmbH, Radolfzell, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C 11/00 (2006.01); B05C 1/08 (2006.01); B05C 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Coating rollers accepting liquid media provide liquid chemicals to substrates for depositing a thin coating layer on the flat substrates, such as semiconductors or panels. The liquid media is cooled to a life-preserving temperature while shielded from the thermal energy heating the substrates to prevent degrading the liquid media. Physical barrier or temperature barrier can be established in vicinities of the rollers to further limit exposing the liquid media to high temperature.