The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Aug. 23, 2010
Michael Hentschel, Dresden, DE;
Thomas Meyer, Dresden, DE;
Hubertus Von Der Waybrink, Dresden, DE;
Marco Kenne, Dresden, DE;
Daniel Stange, Dresden, DE;
Hans-christian Hecht, Weinboehla, DE;
Michael Hentschel, Dresden, DE;
Thomas Meyer, Dresden, DE;
Hubertus Von Der Waybrink, Dresden, DE;
Marco Kenne, Dresden, DE;
Daniel Stange, Dresden, DE;
Hans-Christian Hecht, Weinboehla, DE;
Von Ardenne Anlagentechnik GmbH, Dresden, DE;
Abstract
A surface heating device for a substrate treatment device with increased power density and improved homogeneity of heat radiation includes a jacket tube heater with straight tube sections and bent tube sections in which straight tube sections are arranged parallel to each other in a main plane and straight tube sections are connected to each other by bent tube sections, so that at least part of the bent tube sections are aligned sloped relative to the main plane.