The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 06, 2014

Filed:

Aug. 22, 2011
Applicants:

Alexander Voronov, Yongin, KR;

Suk-ho Lee, Yongin, KR;

Jae-seung Yoo, Yongin, KR;

Kyung-hoe Heo, Yongin, KR;

Gyoo-wan Han, Yongin, KR;

Inventors:

Alexander Voronov, Yongin, KR;

Suk-Ho Lee, Yongin, KR;

Jae-Seung Yoo, Yongin, KR;

Kyung-Hoe Heo, Yongin, KR;

Gyoo-Wan Han, Yongin, KR;

Assignee:

Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A device for inspecting a polycrystalline silicon layer that is crystallized by receiving irradiated laser beams on a front side of the polycrystalline silicon layer includes: a light source configured to emit inspection beams to a rear side of the polycrystalline silicon layer; a light inspector configured to inspect the inspection beams reflected at the rear side of the polycrystalline silicon layer; and a controller that controls the light source and the light inspector.


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