The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Nov. 29, 2011
Martijn Goossens, Veldhoven, NL;
Hilco Suy, Eindhoven, NL;
Peter Gerard Steeneken, Valkenswaard, NL;
Klaus Reimann, Eindhoven, NL;
Martijn Goossens, Veldhoven, NL;
Hilco Suy, Eindhoven, NL;
Peter Gerard Steeneken, Valkenswaard, NL;
Klaus Reimann, Eindhoven, NL;
NXP B.V., Eindhoven, NL;
Abstract
A MEMS switch in which at least first, second and third signal lines are provided over the substrate, which each terminate at a connection region. A lower actuation electrode arrangement is over the substrate. A movable contact electrode is suspended over the connection regions for making or breaking electrical contact between at least two of the three connection regions and an upper actuation electrode provided over the lower actuation electrode. The use of three of more signal lines enables a symmetrical actuation force to be achieved or enables multiple switch functions to be implemented by the single movable electrode, or both.