The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 06, 2014

Filed:

Jun. 15, 2012
Applicants:

Makoto Kubota, Kawasaki, JP;

Motokazu Kobayashi, Yokohama, JP;

Shinji Eritate, Kawasaki, JP;

Fumio Uchida, Daito, JP;

Kenji Maeda, Nakatsugawa, JP;

Chiemi Shimizu, Hirakata, JP;

Inventors:

Makoto Kubota, Kawasaki, JP;

Motokazu Kobayashi, Yokohama, JP;

Shinji Eritate, Kawasaki, JP;

Fumio Uchida, Daito, JP;

Kenji Maeda, Nakatsugawa, JP;

Chiemi Shimizu, Hirakata, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/18 (2006.01); H01L 41/22 (2013.01);
U.S. Cl.
CPC ...
Abstract

There are disclosed a piezoelectric thin film having less non-uniform portions and holding satisfactory piezoelectric characteristics, a method of manufacturing the film, a piezoelectric element using the piezoelectric thin film, and an ink jet system recording head using the piezoelectric element. In the piezoelectric thin film of perovskite crystals formed on a substrate by a sol-gel process and represented by a general formula PbLa(ZrTi)O(where 0≦x<1, 0.05≦y≦1), a film thickness of the thin film is 1000 nm or more and 4000 nm or less, and a difference between a maximum value and a minimum value of y in an arbitrary portion of the thin film is 0.05 or less.


Find Patent Forward Citations

Loading…