The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Dec. 08, 2011
Bruno Imbert, Grenoble, FR;
Emmanuel Defay, Voreppe, FR;
Chrystel Deguet, Saint Ismier, FR;
Hubert Moriceau, Saint Egreve, FR;
Mathieu Pijolat, Sorbiers, FR;
Bruno Imbert, Grenoble, FR;
Emmanuel Defay, Voreppe, FR;
Chrystel Deguet, Saint Ismier, FR;
Hubert Moriceau, Saint Egreve, FR;
Mathieu Pijolat, Sorbiers, FR;
Abstract
A process for fabricating an acoustic wave resonator comprising a suspended membrane comprising a piezoelectric material layer, comprises the following steps: production of a first stack comprising at least one layer of first piezoelectric material on the surface of a first substrate; production of a second stack comprising at least one second substrate; production of at least one non-bonding initiating zone by deposition or creation of particles of controlled sizes leaving the surface of one of said stacks endowed locally with projecting nanostructures before a subsequent bonding step; direct bonding of said two stacks creating a blister between the stacks, due to the presence of the non-bonding initiating zone; and, thinning of the first stack to eliminate at least the first substrate.