The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Nov. 21, 2005
Jörg Krempel-hesse, Eckartsborn, DE;
Andreas Jischke, Kahl, DE;
Uwe Schüssler, Aschaffenburg, DE;
Hans Wolf, Erlensee, DE;
Jörg Krempel-Hesse, Eckartsborn, DE;
Andreas Jischke, Kahl, DE;
Uwe Schüssler, Aschaffenburg, DE;
Hans Wolf, Erlensee, DE;
Applied Materials GmbH & Co KG, Alzenau, DE;
Abstract
To be able to realize a relatively wide magnetron sputter cathode, it is proposed that on the vacuum side of a carrier () is disposed the sputter target () with a backing plate (), which maintains a gap () from the carrier (). The backing plate () is developed as a cooling plate. In it are located cooling means channels (), which, via an inlet () through the carrier (), are supplied with cooling fluid, which can flow out again via an outlet () through the carrier (). On the atmospheric side is located a magnet configuration ().