The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
Jun. 07, 2011
Applicants:
Norihiko Kataoka, Toyama, JP;
Shinichiro Mori, Toyama, JP;
Inventors:
Norihiko Kataoka, Toyama, JP;
Shinichiro Mori, Toyama, JP;
Assignee:
Hitachi Kokusai Electric Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/40 (2006.01); G01N 37/00 (2006.01); G06F 15/00 (2006.01); G06F 11/30 (2006.01); G21C 17/00 (2006.01); G06F 19/00 (2011.01); H01H 43/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is provided a control system of a substrate processing apparatus, comprising: a collecting unit for collecting data from each component that constitutes a substrate processing apparatus, the collecting unit further comprising at least: a buffer for temporarily storing collected data; and a sorting part for rearranging the collected data, based on time data attached to the collected data.