The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
May. 06, 2008
Jong-souk Yeo, Corvallis, OR (US);
Sagi V. Mathai, Berkeley, CA (US);
Michael Renne Ty Tan, Menlo Park, CA (US);
Jong-Souk Yeo, Corvallis, OR (US);
Sagi V. Mathai, Berkeley, CA (US);
Michael Renne Ty Tan, Menlo Park, CA (US);
Hewlett-Packard Development Company, L.P., Houston, TX (US);
Abstract
A method for fabricating a pellicle beam splitter includes etching an aperture in a support substrate; bonding a beam splitter substrate to an upper surface of the support substrate so that the beam splitter substrate covers the aperture; and depositing at least one optical coating on the beam splitter substrate. A pellicle beam splitter includes a support substrate, an aperture created in the support substrate using a semiconductor fabrication processes and a beam-splitting coating covering the aperture.