The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
Jan. 27, 2011
David Edward Dausch, Raleigh, NC (US);
David Edward Dausch, Raleigh, NC (US);
Research Triangle Institute, Research Triangle Park, NC (US);
Abstract
Methods are provided for creating a metal or other electrically-conductive member extending from an air-backed cavity of a piezoelectric ultrasonic transducer (pMUT) apparatus defining such an air-backed cavity, through a substrate layer disposed adjacent to the transducer device of the pMUT device, and into electrically-conductive engagement with a first electrode of the pMUT device, such that the electrically-conductive member provides an electrically-conductive engagement between the first electrode and a conformal electrically-conductive layer deposited in the air-backed cavity of the pMUT device. Associated apparatuses are also provided.