The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
May. 13, 2011
Andreas Hampp, Santa Barbara, CA (US);
Sean F. Harris, Santa Barbara, CA (US);
Talieh H. Sadighi, Santa Barbara, CA (US);
Bengi F. Hanyaloglu, Newbury Park, CA (US);
Andreas Hampp, Santa Barbara, CA (US);
Sean F. Harris, Santa Barbara, CA (US);
Talieh H. Sadighi, Santa Barbara, CA (US);
Bengi F. Hanyaloglu, Newbury Park, CA (US);
Raytheon Company, Waltham, MA (US);
Abstract
According to embodiments of the present disclosure, a method for removing oxide includes placing a sensor chip assembly having an oxide layer formed on a portion thereof within an enclosed and controlled environment. The portion of the sensor chip assembly is exposed to a reactive gas and a UV light to result in a substantial removal of the oxide layer formed on the portion of the sensor chip assembly.