The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 29, 2014

Filed:

Mar. 06, 2009
Applicants:

Francesco Buatier DE Mongeot, Genoa, IT;

Corrado Boragno, Genoa, IT;

Ugo Valbusa, Genoa, IT;

Daniele Chiappe, Genoa, IT;

Andrea Toma, Genoa, IT;

Inventors:

Francesco Buatier De Mongeot, Genoa, IT;

Corrado Boragno, Genoa, IT;

Ugo Valbusa, Genoa, IT;

Daniele Chiappe, Genoa, IT;

Andrea Toma, Genoa, IT;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/36 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method is for the synthesis of an array of metal nanowires (w) capable of supporting localized plasmon resonances. A metal film (M) deposited on a planar substrate (D) is irradiated with a defocused beam of noble gas ions (IB) under high vacuum, so that, with increasing ion doses a corrugation is produced on the metal film surface, formed by a mutually parallel nanoscale self-organized corrugations (r). Subsequently, the height of the self-organized corrugations peaks is increased relative to the valleys (t) interposed therebetween. Then the whole the metal film is eroded so as to expose the substrate at the valleys, and to mutually disconnect the self-organized corrugations, thereby generating the array of metal nanowires. Finally, the transversal cross-section of the nanowires is reduced in a controlled manner so as to adjust the localized plasmon resonances wavelength which can be associated thereto. The nanowires array constitutes an electrode of an improved photonic device.


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