The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
Feb. 02, 2012
Applicant:
Mickael Gros-jean, Grenoble, FR;
Inventor:
Mickael Gros-Jean, Grenoble, FR;
Assignee:
STMicroelectronics (Crolles 2) SAS, Crolles, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for manufacturing a TiN/Ta2O5/TiN capacitor, including the steps of forming a TaOlayer on a TiN support by a plasma-enhanced atomic layer deposition method, or PEALD; and submitting the obtained structure to an NO plasma for a duration sufficient to oxidize the TaOlayer without oxidizing the TiN support.
Gros-Jean, Mickael. (2014). [object object] (U.S. Patent No. 8709907). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8709907
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile