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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8709833 B1

PDFFull Text
Expired
Date of Patent:
Apr. 29, 2014

Filed:

Dec. 22, 2011

Measuring current and resistance using combined diodes/resistor structure to monitor integrated circuit manufacturing process variations

Applicants:

Lyndon R. Logan, Poughkeepsie, NY (US);

Edward J. Nowak, Essex Junction, VT (US);

Robert R. Robison, Colchester, VT (US);

Jonathan K. Winslow, Ii, Yorktown Heights, NY (US);

Inventors:

Lyndon R. Logan, Poughkeepsie, NY (US);

Edward J. Nowak, Essex Junction, VT (US);

Robert R. Robison, Colchester, VT (US);

Jonathan K. Winslow, II, Yorktown Heights, NY (US);

Assignee:

International Business Machines Corporation, Armonk, NY (US);

Attorneys:

Gibb & Riley, LLC

Michael J. LeStrange, Esq.

Primary Examiner:

Dao H Nguyen

Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01R 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

A plurality of diode/resistor devices are formed within an integrated circuit structure using manufacturing equipment operatively connected to a computerized machine. Each of the diode/resistor devices comprises a diode device and a resistor device integrated into a single structure. The resistance of each of the diode/resistor devices is measured during testing of the integrated circuit structure using testing equipment operatively connected to the computerized machine. The current through each of the diode/resistor devices is also measured during testing of the integrated circuit structure using the testing equipment. Then, response curves for the resistance and the current are computed as a function of variations of characteristics of transistor devices within the integrated circuit structure and/or variations of manufacturing processes of the transistor devices within the integrated circuit structure.

Find Patent Forward Citations

Logan, Lyndon. (2014). Measuring current and resistance using combined diodes/resistor structure to monitor integrated circuit manufacturing process variations (U.S. Patent No. 8709833). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8709833

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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