The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
Mar. 21, 2008
Xuegong Deng, Piscataway, NJ (US);
Jian Jim Wang, Orefield, PA (US);
Lei Chen, Clarksburg, MD (US);
Anguel N. Nikolov, Los Angeles, CA (US);
Nada O'brien, Santa Rosa, CA (US);
Xiaoming Liu, Orefield, PA (US);
Xuegong Deng, Piscataway, NJ (US);
Jian Jim Wang, Orefield, PA (US);
Lei Chen, Clarksburg, MD (US);
Anguel N. Nikolov, Los Angeles, CA (US);
Nada O'Brien, Santa Rosa, CA (US);
Xiaoming Liu, Orefield, PA (US);
Polarization Solutions, LLC, Somerset, NJ (US);
Abstract
In general, in a first aspect, the invention features a method that includes forming a first layer comprising a first material over a surface of a second layer, wherein forming the first layer includes sequentially forming a plurality of monolayers of the second material over the surface of the second layer, the second layer comprises a plurality of rows of a second material extending along a first direction and spaced from one another in a second direction orthogonal to the first direction, and the first layer conforms to the surface of the second layer. The method further includes removing portions of the first layer to produce a plurality of rows of the first material extending along the first direction and spaced from one another in the second direction and removing portions of a third layer comprising a third material, where the portions correspond to intervals between the second plurality of rows so that removing the portions forms a plurality of rows of the third material extending along the first direction and spaced apart from one another. The first and second materials are different.