The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
Mar. 21, 2011
Yohei Sato, Yokohama, JP;
Hisashi Okuchi, Yokohama, JP;
Hiroshi Tomita, Yokohama, JP;
Hidekazu Hayashi, Yokohama, JP;
Yukiko Kitajima, Komatsu, JP;
Yohei Sato, Yokohama, JP;
Hisashi Okuchi, Yokohama, JP;
Hiroshi Tomita, Yokohama, JP;
Hidekazu Hayashi, Yokohama, JP;
Yukiko Kitajima, Komatsu, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
In one embodiment, after rinsing a semiconductor substrate having a fine pattern formed thereon with pure water, the pure water staying on the semiconductor substrate is substituted with a water soluble organic solvent, and then, the semiconductor substrate is introduced into a chamber in a state wet with the water soluble organic solvent. Then, the water soluble organic solvent is turned into a supercritical state by increasing a temperature inside of the chamber. Thereafter, the inside of the chamber is reduced in pressure while keeping the inside of the chamber at a temperature enough not to liquefy the pure water (i.e., rinsing pure water mixed into the water soluble organic solvent), and further, the water soluble organic solvent in the supercritical state is changed into a gaseous state, to be discharged from the chamber, so that the semiconductor substrate is dried.