The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2014
Filed:
Jun. 12, 2013
Texas Instruments Incorporated, Dallas, TX (US);
Byron Joseph Palla, Murphy, TX (US);
Stephanie Leanne Hilbun, Garland, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
An integrated circuit is formed by identifying process parameters of a plurality of process steps for the first partial lot containing the integrated circuit; confirming the number of wafers in the first partial lot is less than the wafer carrier capacity; examining lots upstream of the partial lot and identifying a second partial lot which can be combined with the first partial lot into a single wafer carrier and which can be processed with the first partial lot; combining the wafers of the partial lots into a single wafer carrier; processing the partial lots through the plurality of process steps; and performing a multi-lot verification process. The multi-lot verification process determines if all wafers in the partial lots have completed the process step; determines if any wafers in the partial lots are on hold; and determining if all wafers in the partial lots are in a same material carrier.