The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2014
Filed:
Aug. 31, 2012
Applicants:
Chang Han Je, Daejeon, KR;
Jae Woo Lee, Daejeon, KR;
Woo Seok Yang, Daejeon, KR;
Jong Dae Kim, Daejeon, KR;
Inventors:
Chang Han Je, Daejeon, KR;
Jae Woo Lee, Daejeon, KR;
Woo Seok Yang, Daejeon, KR;
Jong Dae Kim, Daejeon, KR;
Assignee:
Electronics and Telecommunications Research Institute, Daejeon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 1/00 (2006.01); H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
H04R 1/00 (2013.01); H04R 31/00 (2013.01);
Abstract
Disclosed are a MEMS microphone and a method of manufacturing the same. The MEMS microphone includes: a substrate; a rear acoustic chamber formed inside a front surface of the substrate; a vibrating plate formed on the substrate and having an exhaust hole; a fixed electrode formed on the vibrating plate; and a fixed electrode support supported by a bottom of the rear acoustic chamber and connected to the fixed electrode through the exhaust hole.