The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 22, 2014

Filed:

May. 12, 2011
Applicant:

Chris Seung Bok Lee, Ithaca, NY (US);

Inventor:

Chris Seung Bok Lee, Ithaca, NY (US);

Assignee:

Calient Technologies, Inc., Goleta, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/06 (2006.01);
U.S. Cl.
CPC ...
Abstract

MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. In an embodiment, a mirror substrate is affixed to a member partially released from a first substrate and a through hole formed in the second substrate is accessed to complete release of the member.


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