The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 22, 2014

Filed:

Dec. 19, 2007
Applicants:

Andrew Phillips, Corvallis, OR (US);

Jeremy H. Donaldson, Corvallis, OR (US);

Julie J. Cox, Albany, OR (US);

Mark H. Mackenzie, Vancouver, WA (US);

Christopher A. Leonard, Philomath, OR (US);

Inventors:

Andrew Phillips, Corvallis, OR (US);

Jeremy H. Donaldson, Corvallis, OR (US);

Julie J. Cox, Albany, OR (US);

Mark H. MacKenzie, Vancouver, WA (US);

Christopher A. Leonard, Philomath, OR (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/72 (2006.01);
U.S. Cl.
CPC ...
Abstract

Embodiments of a system with first means for forming a chamber adjacent to a component formed on a substrate and a single orifice between the chamber and a first surface of the first means that is opposite a second surface of the first means adjacent to the substrate and second means for enclosing the chamber on at least a portion of the first surface that encompasses the single orifice are disclosed.


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