The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2014
Filed:
Sep. 12, 2012
John J. Ellis-monaghan, Grand Isle, VT (US);
Jeffery P. Gambino, Westford, VT (US);
Daniel N. Maynard, Craftsbury, VT (US);
Richard J. Rassel, Colchester, VT (US);
John J. Ellis-Monaghan, Grand Isle, VT (US);
Jeffery P. Gambino, Westford, VT (US);
Daniel N. Maynard, Craftsbury, VT (US);
Richard J. Rassel, Colchester, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
CMOS pixel sensors with multiple pixel sizes and methods of manufacturing the CMOS pixel sensors with implant dose control are provided. The method includes forming a plurality of pixel sensors in a same substrate and forming a masking pattern over at least one of the plurality of pixel sensors that has a pixel size larger than a non-masked pixel sensor of the plurality of pixel sensors. The method further includes providing a single dosage implant to the plurality of pixel sensors. The at least one of the plurality of pixel sensors with the masking pattern receives a lower dosage than the non-masked pixel sensor.