The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2014
Filed:
Feb. 27, 2012
John David Bass, Union City, CA (US);
Ho-cheol Kim, San Jose, CA (US);
Robert Dennis Miller, San Jose, CA (US);
Qing Song, San Jose, CA (US);
Linda Karin Sundberg, Los Gatos, CA (US);
Gregory Michael Wallraff, San Jose, CA (US);
John David Bass, Union City, CA (US);
Ho-Cheol Kim, San Jose, CA (US);
Robert Dennis Miller, San Jose, CA (US);
Qing Song, San Jose, CA (US);
Linda Karin Sundberg, Los Gatos, CA (US);
Gregory Michael Wallraff, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Compositions are disclosed having the formula (3):[C'][Ta(O)(L′)]  (3),wherein x is an integer of 1 to 4, y is an integer of 1 to 4, Ta(O)(L′)has a charge of 0 to −3, C′ is a counterion having a charge of +1 to +3, k is an integer of 0 to 3, L′ is an oxidatively stable organic ligand having a charge of 0 to −4, and L′ comprises an electron donating functional group selected from the group consisting of carboxylates, alkoxides, amines, amine oxides, phosphines, phosphine oxides, arsine oxides, and combinations thereof. The compositions have utility as high resolution photoresists.