Carbon dioxide gas sensors and method of manufacturing and using same

Abstract

A gas sensor comprises a substrate layer; a pair of interdigitated metal electrodes, said electrodes include upper surfaces, the electrodes selected from the group consisting of Pt, Pd, Au, Ir, Ag, Ru, Rh, In, Os, and their alloys. A first layer of solid electrolyte staying in between electrode fingers and partially on said upper surfaces of said electrodes, said first layer selected from NASICON, LISICON, KSICON and β″-Alumina. A second layer of metal carbonate(s) as an auxiliary electrolyte engaging said upper surfaces of the electrodes and the first solid electrolyte. The metal carbonates selected from the group consisting of the following ions Na, K, Li, Ag, H, Pb, Sr, Ba, and any combination thereof. An extra layer of metal oxide selected from the group consisting of SnO, InO, TiO, WO, ZnO, FeO, ITO, CdO, UO, TaO, BaO, MoO, MoO, VO, NbO, CuO, CrO, LaO, RuO, RuO, ReO, ReO, AgO, CoO, CuO, SnO, NiO, PrO, BaO, PdO, HfO, HfOor other metal oxide and their mixtures residing above and in engagement with the second electrolyte to improve sensor performance and/or to reduce sensor heating power consumption.