The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2014
Filed:
Jan. 11, 2012
Kiyoshi Hashimotodani, Kyoto, JP;
Yusuke Nakano, Osaka, JP;
Masaya Nakatani, Hyogo, JP;
Takeki Yamamoto, Hyogo, JP;
Yoshiki Yamada, Osaka, JP;
Takuya Oka, Kyoto, JP;
Hiroshi Ushio, Osaka, JP;
Kiyoshi Hashimotodani, Kyoto, JP;
Yusuke Nakano, Osaka, JP;
Masaya Nakatani, Hyogo, JP;
Takeki Yamamoto, Hyogo, JP;
Yoshiki Yamada, Osaka, JP;
Takuya Oka, Kyoto, JP;
Hiroshi Ushio, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
A sensor chip is a sensor device for measuring a property of a substance by adsorbing the substance on a surface of the sensor chip. The sensor chip includes a diaphragm having a first surface, a second surface, and at least one through hole penetrating from the first surface to the second surface. At least a part of the first surface, the second surface, and an inner wall surface of the through hole is covered with a noncrystalline solid layer including SiOX as a main component, in which substance X is an element having higher electronegativity than that of silicon.