The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2014
Filed:
Feb. 03, 2011
Applicants:
Tatsutoshi Suzuki, Yokaichi, JP;
Eisuke Suzuki, Yokaichi, JP;
Inventors:
Tatsutoshi Suzuki, Yokaichi, JP;
Eisuke Suzuki, Yokaichi, JP;
Assignee:
Toho Engineering, Yokaichi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A construction of a polishing pad sub plate that is able, while maintaining the fixing strength of the polishing pad to the rotation table, to make possible the easy removal of the polishing pad from the rotation table, and in particular, by preventing injury to the polishing pad when peeling it from the rotation table is offered.