The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2014
Filed:
Jun. 28, 2006
Alexander Todorov, Santa Clara, CA (US);
Alexander Todorov, Santa Clara, CA (US);
Genmark Automation, Inc., Milpitas, CA (US);
Abstract
A substrate handling robot having a robot body and a robot arm with an end effector is configured to exhibit angular (θ), radial (R) and Z motion. A pair of coaxial shafts link the robot arm to respective motors dedicated to angular (θ) and radial (R) motions. The motors are stationarily mounted with respect to the robot body. The shafts are rotatably supported by a floating platform which is motivated in the Z direction by a third motor also stationarily mounted with respect to the robot body. The third motor is coupled to the platform by a Z motion linkage. The first and second motors are coupled to the coaxial shafts by angular and radial motion linkages each of which includes primary and secondary timing belts whose relative motions are synchronized with the Z motion linkage to achieve controllable independent angular (θ), radial (R) and Z motions in a simple, light-weight package.