The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2014
Filed:
Apr. 29, 2010
Junji Suzuki, Tama, JP;
Soichi Owa, Kumagaya, JP;
Junji Suzuki, Tama, JP;
Soichi Owa, Kumagaya, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A microactuator includes a base member, a plate-shaped member which is deflectively deformable, and a driving force applying device. A driving objective is connected to a predetermined portion of a deflectively deformable area of the plate-shaped member. The driving force applying device deflectively deforms the deflectively deformable area to change an inclination of the predetermined portion of the plate-shaped member between a first inclination and a second inclination; and a part of the plate-shaped member or a part of a member fixed to the plate-shaped member is brought into abutment against a member when the inclination is the first inclination, and the part of the plate-shaped member or the part of the member fixed to the plate-shaped member is brought into abutment against the base member when the inclination is the second inclination.