The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2014
Filed:
Dec. 04, 2009
Applicant:
Masayuki Shiraishi, Kumagaya, JP;
Inventor:
Masayuki Shiraishi, Kumagaya, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/00 (2006.01); G03B 27/52 (2006.01); G03B 27/32 (2006.01); G03C 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A measuring member has a first face and a plurality of first marks arranged on the first face. The first marks have respective orientations corresponding to their positions in a first direction.
Quick Actions:
Shiraishi, Masayuki. (2014). Measuring member, sensor, measuring method, exposure apparatus, exposure method, and device producing method (U.S. Patent No. 8699014). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8699014
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