The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2014
Filed:
Aug. 12, 2010
Yasuo Aoki, Zushi, JP;
Tomohide Hamada, Yokohama, JP;
Hiroshi Shirasu, Yokohama, JP;
Manabu Toguchi, Yokohama, JP;
Yasuo Aoki, Zushi, JP;
Tomohide Hamada, Yokohama, JP;
Hiroshi Shirasu, Yokohama, JP;
Manabu Toguchi, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A substrate is held by adsorption by a substrate holding frame that is formed into a frame shape and is lightweight, and the substrate holding frame is driven along a horizontal plane by a drive unit that includes a linear motor. Below the substrate holding frame, a plurality of air levitation units are placed that support by levitation the substrate in a noncontact manner such that the substrate is substantially horizontal, by jetting air to the lower surface of the substrate. Since the plurality of air levitation units cover a movement range of the substrate holding frame, the drive unit can guide the substrate holding frame (substrate) along the horizontal plane at high speed and with high precision.