The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2014
Filed:
Jun. 30, 2010
Tomohide Kamiyama, Osaka, JP;
Tomohiro Iwasaki, Shiga, JP;
Takehiko Yamakawa, Osaka, JP;
Kunihiko Nakamura, Osaka, JP;
Keiji Onishi, Osaka, JP;
Tomohide Kamiyama, Osaka, JP;
Tomohiro Iwasaki, Shiga, JP;
Takehiko Yamakawa, Osaka, JP;
Kunihiko Nakamura, Osaka, JP;
Keiji Onishi, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate, an insulation layerformed selectively on the substrateas a sacrificial surface, a beamformed on the substratevia a space, a first support portionA formed on the insulation layerof the same material as that of the beam, and electrodes formed with a space defined between the beamand themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beamand a sectional area of the first support portionA are substantially equal in a section which is perpendicular to a longitudinal direction of the beam