The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2014
Filed:
Oct. 28, 2011
Toshihiro Nishisaka, Hiratsuka, JP;
Yukio Watanabe, Hiratsuka, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Hideo Hoshino, Hiratsuka, JP;
Toshihiro Nishisaka, Hiratsuka, JP;
Yukio Watanabe, Hiratsuka, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Hideo Hoshino, Hiratsuka, JP;
Gigaphonton Inc., Tochigi, JP;
Abstract
An apparatus for generating extreme ultraviolet light by exciting a target material to turn the target material into plasma may include: a frame; a chamber in which the extreme ultraviolet light is generated; a target supply unit for supplying the target material into the chamber; a first connection member for connecting the frame and the chamber flexibly; a mechanism for fixing the target supply unit to the frame; and a second connection member for connecting the target supply unit to the chamber flexibly.