The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 15, 2014

Filed:

Oct. 30, 2012
Applicant:

Panasonic Corporation, Osaka, JP;

Inventors:

Sadayuki Okazaki, Osaka, JP;

Kazuyoshi Honda, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A substrate-conveying roller includes a first shell, a second shell, an internal block, a manifold, and a clearance. The first shell has a plurality of first through holes serving as supply paths for a gas. The internal block is disposed inside the first shell. The manifold is formed in the internal block so as to guide the gas to the first through holes within the region of a specific angle. The clearance is formed so as to guide the gas to the first through holes outside the region of the specific angle. The second shell has second through holes for guiding the gas from the manifold to the first through holes, and is disposed between the first shell and the internal block. The central axes of the first through hole are offset from the central axes of the second through holes.


Find Patent Forward Citations

Loading…