Flexible force or pressure sensor array using semiconductor strain gauge, fabrication method thereof and measurement method thereof

Abstract

The force or pressure sensor array of the present invention effectively has both flexibility and elasticity. Since the substrate itself is a kind of a polymer material, the substrate can be bent or expanded. Although silicon, which is a material of the semiconductor strain gauge, is easily broken and solid, mechanical flexibility can be secured if it is fabricated extremely thin. To this end, particularly, disclosed is a flexible force or pressure sensor array using semiconductor strain gauges, the sensor array comprising: a substrateincluding: the semiconductor strain gaugesin which a plurality of elements formed in a certain array pattern is deformed by force or pressure, a pair of polymer film layersandhaving film surfaces contacted facing each other and containing the semiconductor strain gaugebetween the film surfaces contacted with each other, and a pair of signal line layers formed on top and bottom surfaces of an insulating layer using either of the pair of polymer film layersandas the insulating layer and connected to the elementsof the array pattern to form electrodes, for fetching deformation signals outputted due to deformation of the elementsto outside; and a pair of elastomer layersandformed on both sides of the substrateto contain the substrateinside.