The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2014
Filed:
May. 26, 2011
Jochen Reinmuth, Reutlingen, DE;
Ralf Boessendoerfer, Dinkelsbuehl, DE;
Axel Franke, Ditzingen, DE;
Mirko Hattass, Stuttgart, DE;
Jochen Reinmuth, Reutlingen, DE;
Ralf Boessendoerfer, Dinkelsbuehl, DE;
Axel Franke, Ditzingen, DE;
Mirko Hattass, Stuttgart, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A micromechanical component is described including a substrate having a spacer layer and a test structure for ascertaining the thickness of the spacer layer. The test structure includes a seismic mass, which is elastically deflectable along a measuring axis parallel to the substrate, a first electrode system and a second electrode system for deflecting the seismic mass along the measuring axis, having a mass electrode, which is produced by a part of the seismic mass, and a substrate electrode, which is situated on the substrate in each case, the first electrode system being designed to be thicker than the second electrode system by the layer thickness of the spacer layer.