The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2014
Filed:
Aug. 29, 2011
Yu Wen Hsu, Tainan, TW;
Shih Ting Lin, Hualien, TW;
Jen Yi Chen, Xinpu Township, Hsinchu County, TW;
Chao Ta Huang, Hsinchu, TW;
Yu Wen Hsu, Tainan, TW;
Shih Ting Lin, Hualien, TW;
Jen Yi Chen, Xinpu Township, Hsinchu County, TW;
Chao Ta Huang, Hsinchu, TW;
Industrial Technology Research Institute, Chutung, Hsinchu, TW;
Abstract
The disclosure relates to a micro-electromechanical system (MEMS) device having an electrical insulating structure. The MEMS device includes at least one moving part, at least one anchor, at least one spring and an insulating layer. The spring is connected to the anchor and to the moving part. The insulating layer is disposed in the moving part and the anchor. Each of the moving part and the anchor is divided into two conductive portions by the insulating layer. Whereby, the electrical signals of different moving parts are transmitted through the insulated electrical paths which are not electrically connected.