The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2014
Filed:
Apr. 25, 2011
Douglas Ray Sparks, Whitmore Lake, MI (US);
Michael W. Putty, Grosse Point Woods, MI (US);
Nader Najafi, Ann Arbor, MI (US);
Richard Thayre Smith, Saline, MI (US);
Douglas Ray Sparks, Whitmore Lake, MI (US);
Michael W. Putty, Grosse Point Woods, MI (US);
Nader Najafi, Ann Arbor, MI (US);
Richard Thayre Smith, Saline, MI (US);
Integrated Sensing Systems, Inc., Ypsilanti, MI (US);
Abstract
Fluidic systems and methods of determining properties of fluids flowing therein. The fluidic systems and methods make use of a micromachined device that determines at least one property of the fluid within the system. The micromachined device includes a base structure on a substrate and a tube structure extending from the base structure and spaced apart from a surface of the substrate. The tube structure has at least one pair of geometrically parallel tube portions substantially lying in a plane, and at least one continuous internal passage defined at least in part within the parallel tube portions. A drive element induces vibrational movement of the tube structure in the plane of the tube structure and induces resonant vibrational movements in the tube portions in the plane of the tube structure. A sensing element senses deflections of each tube portion in the plane of the tube structure.