The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2014
Filed:
Jan. 29, 2013
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Dean Jennings, Beverly, MA (US);
Timothy N. Thomas, Portland, OR (US);
Stephen Moffatt, St. Brelade, JE;
Jiping Li, Palo Alto, CA (US);
Bruce E. Adams, Portland, OR (US);
Samuel C. Howells, Portland, OR (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/01 (2006.01); G02B 27/28 (2006.01);
U.S. Cl.
CPC ...
G02B 27/283 (2013.01);
Abstract
A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating.