The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2014
Filed:
Aug. 22, 2012
William P. Laceky, Georgetown, TX (US);
Izya Kremerman, Los Gatos, CA (US);
William P. Laceky, Georgetown, TX (US);
Izya Kremerman, Los Gatos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Systems, apparatus and methods are disclosed for allowing electrical connection to a robot apparatus. In one aspect, an electrical coupling is adapted to provide electrical power to the robot apparatus in the vacuum chamber. The electrical coupling may include engaging electrical contacts. In some embodiments, at least one of the contacts may be suspended relative to a spring such that the engaging contacts do not rotate relative to each other during arm rotation of the robot. In other embodiments, inductively coupled coils are included. Numerous other aspects are provided.