The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2014
Filed:
Jun. 03, 2009
Applicants:
Jochen Reinmuth, Reutlingen, DE;
Michael Saettler, Kusterdingen, DE;
Stefan Weiss, Tuebingen, DE;
Arnim Hoechst, Reutlingen, DE;
Inventors:
Jochen Reinmuth, Reutlingen, DE;
Michael Saettler, Kusterdingen, DE;
Stefan Weiss, Tuebingen, DE;
Arnim Hoechst, Reutlingen, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 17/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a method for manufacturing a micromechanical component, a cavity is produced in the substrate from an opening at the rear of a monocrystalline semiconductor substrate. The etching process used for this purpose and the monocrystalline semiconductor substrate used are controlled in such a way that a largely rectangular cavity is formed.