The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2014
Filed:
Aug. 25, 2009
Kohei Kawazoe, Nagasaki, JP;
Kazutaka Uda, Nagasaki, JP;
Tomoyoshi Baba, Nagasaki, JP;
Takashi Ishide, Takasago, JP;
Sachiko Nakao, Nagasaki, JP;
Kohei Kawazoe, Nagasaki, JP;
Kazutaka Uda, Nagasaki, JP;
Tomoyoshi Baba, Nagasaki, JP;
Takashi Ishide, Takasago, JP;
Sachiko Nakao, Nagasaki, JP;
Mitsubishi Heavy Industries, Ltd., Tokyo, JP;
Abstract
Provided is a method for manufacturing a photoelectric-conversion-device capable of controlling the groove depth of a processed groove to a desired value. The method for manufacturing a photoelectric conversion device () includes a groove forming step of irradiating an intermediate-contact-layer separating groove () constituting a photoelectric conversion device () with a picosecond laser and of moving the picosecond laser relative to the intermediate-contact-layer separating groove (), thereby forming a processed groove () in a predetermined scanning direction. In the groove forming step, interference fringes arranged in parallel in one direction are formed in an irradiated area corresponding to a beam diameter of the picosecond laser, and the picosecond laser is relatively moved such that the interference fringes are joined in the scanning direction.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile