The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2014
Filed:
Mar. 30, 2011
Leonid M. Tertitski, Los Gatos, CA (US);
Krishna Kumar Kuttannair, San Jose, CA (US);
Aaron Muir Hunter, Santa Cruz, CA (US);
Stephen Moffatt, St. Brelade, JE;
Leonid M. Tertitski, Los Gatos, CA (US);
Krishna Kumar Kuttannair, San Jose, CA (US);
Aaron Muir Hunter, Santa Cruz, CA (US);
Stephen Moffatt, St. Brelade, JE;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method and apparatus for targeting a beam of radiation is provided. A beam steering mirror and a beam capture mirror are movably disposed along an optical pathway. A controller moves the beam steering mirror and the beam capture mirror in an x-y plane, and rotates the mirrors, to target the beam to a target location on a surface, while keeping the optical path length substantially constant for all target locations on the surface. The surface is rotated by a rotational actuator to bring all target locations to positions accessible by the beam targeting optics. Imprecision in targeting and optical path length may be compensated by providing an actuated aperture at the beam entry point and/or a variable focus lens with an optical range finding detector, all in communication with the controller.